The development of a contactless sensor based on the Laser-Self-Mixing effect for the simultaneous measurement of linear and transverse degrees-of-freedom (DOFs) of a moving target is described in this paper. The sensor is made of three laser diodes with integrated monitor photodiodes, and a properly designed reflective target attached to the moving object. The proposed technique exploits the differential measurement of linear displacements by two identical self-mixing interferometers (SMIs) and makes the system more compact and easier to align with respect to traditional interferometric systems, thus providing an effective low-cost motion control system. The feasibility of the proposed sensor is experimentally demonstrated over a range of 1 m for linear motion and +/- 6 mm for transverse displacements, with resolutions of 0.7 mu m and 20 mu m, respectively.
A self-mixing laser sensor for the real-time correction of straightness/flatness deviations of a linear slide
DABBICCO, Maurizio;SCAMARCIO, Gaetano
2009-01-01
Abstract
The development of a contactless sensor based on the Laser-Self-Mixing effect for the simultaneous measurement of linear and transverse degrees-of-freedom (DOFs) of a moving target is described in this paper. The sensor is made of three laser diodes with integrated monitor photodiodes, and a properly designed reflective target attached to the moving object. The proposed technique exploits the differential measurement of linear displacements by two identical self-mixing interferometers (SMIs) and makes the system more compact and easier to align with respect to traditional interferometric systems, thus providing an effective low-cost motion control system. The feasibility of the proposed sensor is experimentally demonstrated over a range of 1 m for linear motion and +/- 6 mm for transverse displacements, with resolutions of 0.7 mu m and 20 mu m, respectively.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
