PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications.

Process control for plasma processing of polymers

FAVIA, Pietro;
2001-01-01

Abstract

PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11586/75078
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