PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications.
Process control for plasma processing of polymers
FAVIA, Pietro;
2001-01-01
Abstract
PE-CVD processes of a variety of coatings - fluoropolymers, SiOx, PEO- and Ag-PEO-like, -COOH functional layers - are described, as well as plasma treatments aimed to selectively graft -NH2 groups on polymers, with the use of spectroscopic plasma- and surface-diagnostics parameters of potential use for process transfer and control in industrial applications.File in questo prodotto:
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