PET and Kapton thin films have been plasma processed in order to increase sputtered aluminum adhesion. The effect of different plasma feedings, such as NH3, O-2, and He, has been evaluated on polymer/metal adhesion and on chemical modifications of polymer surface at different plasma power and treatment time. The chemistry at polymer/metal interface has been studied in order to find the suitable experimental conditions for transferring the plasma process to industrial scale. The role of acid-base reactions in promoting Polymer/Aluminum adhesion has been investigated. Surface composition has been investigated by X-ray Photoelectron Spectroscopy; adhesion measurements have been accomplished by 180 degrees Peel Test
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