X-Ray Diffraction Topography (XRDT) and Optical Microscopy (OM) are adopted to study extended structural defects in 6H-SiC bulky crystals. Topographs are taken by means of White Beam Synchrotron Radiation Source (WB-SRS-XRDT) and by means of monochromatic radiation (MoKα(1)) with conventional source (Lang method). All studied samples are characterised by the presence of linear defects, dislocations and micro-channels, uniformly distributed in the crystal. Such defects draw a net of independent systems of parallel lines, with different orientation and different contrast widths. Micro-channels are parallel to the c axis, whereas dislocations are perpendicular or nearly parallel to the c axis. The last are unit screw dislocations. It has been concluded that the growth mechanism is driven by screw dislocations and that channels results from the coalescence of parallel dislocations.
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|Titolo:||XRDT study of structural defects of 6H-SiC crystals|
AGROSI', Giovanna (Corresponding)
|Data di pubblicazione:||2005|
|Appare nelle tipologie:||2.1 Contributo in volume (Capitolo o Saggio)|