CINECA IRIS Institutional Research Information System
IRIS è la soluzione IT che facilita la raccolta e la gestione dei dati relativi alle attività e ai prodotti della ricerca. Fornisce a ricercatori, amministratori e valutatori gli strumenti per monitorare i risultati della ricerca, aumentarne la visibilità e allocare in modo efficace le risorse disponibili.
EnglishThe chemical composition and the reactivity of films deposited in RF glow discharges fed with Ar-tetramethylsilane and Ar-tetramethylsilane-O2 mixtures have been studied by X-ray photoelectron spectroscopy. The analyses have been performed by means of a spectrometer connected in vacuo to the deposition reactor. This configuration allows to analyze as deposited films without any external contamination of oxygen and moisture. The work has been conducted by studying the detailed Si2p, C1s, and O1s signals at different electron take-off angles, as well as the valence band region. Depth profiling of films by means of Ar+ ion sputtering has also been performed in some cases.
Scheda prodotto non validato
Attenzione! I dati visualizzati non sono stati sottoposti a validazione da parte dell'ateneo
| Titolo: | X-ray Photoelectron Spectroscopy of plasma-polymerized films from tetramethylsilane containing feeds |
| Autori: | |
| Data di pubblicazione: | 1992 |
| Rivista: | |
| Abstract: | The chemical composition and the reactivity of films deposited in RF glow discharges fed with Ar-tetramethylsilane and Ar-tetramethylsilane-O2 mixtures have been studied by X-ray photoelectron spectroscopy. The analyses have been performed by means of a spectrometer connected in vacuo to the deposition reactor. This configuration allows to analyze as deposited films without any external contamination of oxygen and moisture. The work has been conducted by studying the detailed Si2p, C1s, and O1s signals at different electron take-off angles, as well as the valence band region. Depth profiling of films by means of Ar+ ion sputtering has also been performed in some cases. |
| Handle: | http://hdl.handle.net/11586/133108 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
http://hdl.handle.net/11586/133108
Copyright © 2021