Organic thin films have been deposited onto various substrates by means of radiofrequency glow discharges fed with acrylic acid vapors. The effect of the experimental parameters on film composition has been investigated with X-ray Photoelectron and FT-IR spectroscopies; Optical Emission Spectroscopy has been carried out for plasma phase characterization. It is shown that the concentration of oxygen and carboxylic groups in the coating decreases with increasing power, while the concentration trend of CO species in the plasma increases. It is demonstrated that films deposited from acrylic acid, which can be used as functional layers for biomolecule immobilization, can be deposited with a controlled surface concentration of -COOH groups through a simple in situ monitoring of the deposition process.
PE-CVD of organic thin films with controlled surface concentration of carboxylic groups
FAVIA, Pietro;
1999-01-01
Abstract
Organic thin films have been deposited onto various substrates by means of radiofrequency glow discharges fed with acrylic acid vapors. The effect of the experimental parameters on film composition has been investigated with X-ray Photoelectron and FT-IR spectroscopies; Optical Emission Spectroscopy has been carried out for plasma phase characterization. It is shown that the concentration of oxygen and carboxylic groups in the coating decreases with increasing power, while the concentration trend of CO species in the plasma increases. It is demonstrated that films deposited from acrylic acid, which can be used as functional layers for biomolecule immobilization, can be deposited with a controlled surface concentration of -COOH groups through a simple in situ monitoring of the deposition process.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
